| 摘要 |
PROBLEM TO BE SOLVED: To divide a CdS film and a transparent conductive film into single cell units at once, by forming the transparent conductive film on a light- permeable insulation substrate and then the CdS film, and irradiating a laser beam in a specified pattern to evaporate and remove the CdS film and underlying transparent conductive film. SOLUTION: Cadmium sulfide is coated on an SnO2 film 11 of a thin film forming substrate 1, dried at 110 deg.C to volatilize a solvent, heated in the atmospheric air to thermally decompose an org. metal compd., thereby forming a CdS film 2. Using a YAG laser with a Q-switch, a laser beam in a pattern for dividing the CdS film 2 and SnO2 film 11 into 42 cells is irradiated to evaporate and remove the irradiated parts of the CdS film 2 and SnO2 film 11, thus scribing both films 2, 11 at the same time whereby the CdS film 2 and SnO2 film 11 can be divided into cell units in the same pattern. Hence, the CdS film and transparent conductive film and be divided into cell units at once. |
