Double-magnetron sputtering unit for large area reactive plasma-enhanced deposition of e.g. light absorbing layers on metal strips for solar absorbers or heat reflective layers on window glass

摘要

A double-magnetron sputtering unit has magnetrons with an inner magnetic pole (2) magnetic field strength lower than the outer magnetic pole (3) magnetic field strength. A medium frequency voltage double-magnetron sputtering unit has individual magnetrons in which the inner magnetic pole magnetic field strength, measured in the target plane, is lower than the outer magnetic pole magnetic field strength. Preferred Features: The inner magnetic pole (3) consists of a high permeability material such as St 37 and the outer magnetic pole (2) consists of a hard magnetic material such as SmCo or NdFeB.