Micromechanical magnetic field sensor

摘要

The sensor has a conductor track unit (50) and a second capacitor plate unit (61,66,71,76), which is fixed to the substrate and forms a capacitor unit with a first capacitor plate unit (56,57). A magnetic field detection unit is provided to conduct a predetermined current through the conductor track unit and to determine the capacitance alteration of the capacitor unit, occurring in dependence of an applied magnetic field.