| 摘要 |
PROBLEM TO BE SOLVED: To produce a carbonaceous film without defects in physical properties due to the formation, etc., of holes and having a homogeneous composition by carbonizing a precursor into which a functional group containing boron is introduced into the skeletal structure of a polyimide by heat treatment. SOLUTION: A polyimide is used as a precursor of a carbonaceous film and a functional group containing boron is introduced into the skeletal structure of the polyimide. The objective carbonaceous film containing nitrogen and the boron is produced by carbonizing the precursor by heat treatment. The polyimide used as the precursor regulatively precontains the nitrogen in the molecule and is frequently used as the precursor of a highly oriented carbonaceous material. When the functional group containing the boron is introduced into the precursor, the precursor is readily carbonized by the heat treatment and the nitrogen and boron are more densely and uniformly contained in the resultant carbonaceous film. The kind of the functional group containing the boron is not especially limited. |
