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发明名称
SUBSTRATE TREATING APPARATUS
摘要
申请公布号
JPH11350144(A)
申请公布日期
1999.12.21
申请号
JP19980156089
申请日期
1998.06.04
申请人
KOKUSAI ELECTRIC CO LTD
发明人
YOKOI YOSHIO
分类号
C23C16/44;C23C16/50;H01L21/205;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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