Micro mechanical sensor for identifying magnetic fields which consists of at least two soft magnetic contacts at least one of which is located by spring which due to reaction

摘要

The sensor includes mold type depressions (18) arranged at the top sides of the first base plate (17) are provided by the micro-structuring method. The first base plate is made of a soft magnetic material. The surface of a second base plate is made of a nonmagnetic but electrically conducting material consisting of metal tongues (3), so designed clamped at one side, so that only at the clamping place, produces an electrically conducting and material keyed connection at the bearing (4) of the tongue (3). The other end of the tongue can lift off against the spring force of the tongue, and this free end forms the first contact. The cantilever held tongues (3) consist of soft magnetic material and their surface normals stand at right angles to the top side of the base plate. A multiple of troughs and tongues are provided at the base plate.