发明名称 |
INTERFEROMETER |
摘要 |
Interferometer for measuring a phase difference between a reference beam (37) and an object beam (36') transformed by an optical element (10), comprising light source means (2), an optical device (3) and detection means (4) in a detection plane (34). The optical device (3) comprises a first light conductor (30) having a first output surface (31) that generates an object beam (36) having a spherical wave front and a second light conductor (32) having a second output surface (33) that generates a reference beam (37) having a spherical wave front, directed onto the detection plane (34), wherein the set-up of the first light conductor (30) and the optical element (10) is such that the transformed object beam (36') interferes with the reference beam (37) in the detection plane (34).
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申请公布号 |
WO9964817(A1) |
申请公布日期 |
1999.12.16 |
申请号 |
WO1999NL00357 |
申请日期 |
1999.06.09 |
申请人 |
STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN;KLAVER, RENATUS, GERARDUS |
发明人 |
KLAVER, RENATUS, GERARDUS |
分类号 |
G01B9/02;G01B11/24;G01B11/245;G01B11/255;G01M11/02;G03F7/20;(IPC1-7):G01B11/24 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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