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发明名称
PICK-UP APPARATUS AND METHOD FOR SEMICONDUCTOR CHIPS
摘要
申请公布号
KR100235929(B1)
申请公布日期
1999.12.15
申请号
KR19960019289
申请日期
1996.05.31
申请人
NIPPON ELECTRIC K.K.
发明人
HONDA, MOTOHAROO
分类号
H01L21/66;H01L21/00;H01L21/52;H01L21/67;H01L21/68;(IPC1-7):H01L21/52
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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