| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a positioning and fixing mechanism for a cassette, which facilitates the positioning of a cassette to substrate transfer equipment and enables highly accurate correction and substrate transfer equipment, using the mechanism. SOLUTION: In the almost central part of a table body 611 of a turn table 61, a rectangular recessed part 612 in plan view into which a leg part CL of a cassette C can be inserted is formed. In the longitudinal direction of the recessed part 612, movable members 91, 92 are arranged, so as to interpose the leg part CL of the cassette C inserted into the recessed part 812 between the members 91 and 92. In the one movable member 91, a notched part 911 is formed engagingly with a salient member 613 which protrudes upwards from the table body 611 and comes freely into contact and leaves with the recessed part 612. By fitting a gap adjusting member 93 such as a suitable shim in the part between a salient member 613 and the notched part 911, an abutting surface against the leg part CL of the cassette C can be adjusted finely.</p> |
