| 摘要 |
A wafer cassette conveying system is capable of reducing a communication amount between a conveying device and a control device, further shortening the time period required for a movement of the conveying device. A control device 15, when receiving both of a lot carrying-in request signal outputted from a first treating device 11 and an empty cassette carrying-out request signal outputted from a second treating device 12, outputs a lot carrying-in command signal. A conveying device 20, when receiving this lot carrying-in command signal, conveys an actual cassette of the first treating device 11 to the second treating device 12 and also conveys an empty cassette of the second treating device 12 to an empty cassette space 14.
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