FILM PREPARING APPARATUS,申请号JP19980166098-传众专利搜索

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发明名称	FILM PREPARING APPARATUS
摘要
申请公布号	JPH11345777(A)	申请公布日期	1999.12.14
申请号	JP19980166098	申请日期	1998.05.29
申请人	TOKYO ELECTRON LTD	发明人	KATO HISASHI;TAMURA TATSUYA;HIRAI JUN;IITAKA AZUSA
分类号	C23C16/44;C23C16/455;H01L21/205;H01L21/31;(IPC1-7):H01L21/205	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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