| 摘要 |
<p>PROBLEM TO BE SOLVED: To maintain and control constant test temperature of a wafer in a container, such as thermostatic chamber, during reliability test. SOLUTION: This temperature control device for multi-stage containers comprises cooling jackets 10B and 11 built into a plurality of test containers which are disposed on multiple stages, a tank 12 for cooling water, pumps 15A and 15B for supplying cooling water C to the cooling jackets 10B and 11, partition plates 16A and 16B for dividing the tank 12 into a first storage area 12A for storing unused cooling water C and a second storage area 12B for storing the used cooling water C, a pump 24 for transferring the cooling water C from the second storage area 12B to the first storage area 12A and a heat exchanger 23 for cooling the cooling water C to a fixed temperature during transfer.</p> |
