| 摘要 |
PROBLEM TO BE SOLVED: To keep foot print to a minimum, and also to simplify the control mechanism at its carrying between each processing part, and moreover to put the system directly in line with an external device. SOLUTION: This board processor is provided with processing parts 30, 40, and 50 adjacent along an X-axis and is also provided with a wafer stage 20 adjacent in the X-direction of the processing part 30. The processing parts 30, 40, and 50 successively perform processings to a wafer W in this order. The carriage from the wafer stage 20 to the processing part 30, the carriage from the processing part 30 to the processing part 40, and the carriage from the processing part 40 to the processing part 50 are performed at the same time by a shuttle carriage robot 60 which is movable in the X-direction. Moreover, this is provided with a carriage path 15, where the carriage robot 10 shifts in parallel with the direction of arrangement of the processing parts 30, 40, and 50 and is provided with a wafer storage 7 along the carriage path 15. With this constitution, the foot print can be minimized, and also an external device can be connected directly via the wafer stage 20. |
