| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer arm of a semiconductor wafer transfer machine and a transfer machine equipped with the arm. SOLUTION: In the upper part of a transfer arm 70, a pushing part 72 capable of having a wafer W pushed at the right position of a carrier 10 is installed, which wafer gets out of a right position of a carrier 10 and is mounted on it. This transfer machine is equipped with a plate 12 on which a carrier 10 mounting wafers W is positioned, the transfer arm 70 on which the pushing part 72 is installed on the upper section, and a first sensing means capable of sensing a wafer W at a vertical position of the wafer W which veers off the correct position of the carrier 10 and is mounted on it. Consequently, the wafer W which veers off the correct position and is mounted on the carrier is sensed accurately and mounted accurately on the carrier 10. Thereby the damage on the wafer W due to the veering off during the transfer can be prevented. |
