LIQUID CRYSTAL DISPLAY AND FABRICATION THEREOF

摘要

PROBLEM TO BE SOLVED: To improve step coverage of thin film transistor by employing such a structure as upper second conductor film do not overhang lower first conductor film in first and second ohmic electrodes. SOLUTION: A conductor layer 27a is formed such that the edge thereof is aligned with an underlying n<+> type amorphous silicon pattern 26A or retracted inward therefrom and an overlying conductor layer 27b is formed such that the edge thereof is retracted inward from the conductor layer 27a. Similarly, a conductor layer 27d is formed such that the edge thereof is aligned with an underlying n<+> type amorphous silicon pattern 26B or retracted inward therefrom and an overlying conductor layer 27e is formed such that the edge thereof is retracted inward from the conductor layer 27d. A protective layer 28 is formed on ohmic electrodes 37A, 37B such that it comes into direct contact with the conductor layer 27e. This structure improves step coverage of the protective insulating film 28 with respect to the ohmic electrode 37A or 37B.