METHOD OF MAKING CARBON-CONTAINING COATS, DIAMOND-LIKE COATS INCLUSIVE

摘要

FIELD: microelectronics; making isolating protective and camouflage coats; other industries for making mechanically durable and wear-resistant coats; coats resistant to chemicals and surrounding medium. SUBSTANCE: method consists in forming plasma in vacuum chamber through evaporation of liquid hydrocarbon at supply of high-frequency voltage to backing holder; prior to starting the process, chamber is evacuated to pressure not higher than <EMI ID=0.378 HE=6 WI=12 TI=CHI> torr and voltages are supplied to hot cathode, anode and backing holder to ensure stationary deposition process and heating of ceramic leak for feeding liquid hydrocarbon to 300-900 C; then argon is fed to chamber till burning of plasma becomes stable followed by 3- to 25- minutes stand, after which backings are isolated from flow of plasma and liquid hydrocarbon delivery through ceramic leak is cut in; one minute after this, supply of argon is discontinued after which isolation of backings is cased. EFFECT: improved quality of coat; reduced internal elastic stresses; enhanced adhesion; increased thickness of coat. 11 ex