A solid state transducer (9) is disclosed. The transducer comprises a micromachined electrostatic actuator (16) formed of silicon, a support brace (10) disposed about the actuator, and a membrane (14) coupled to the support brace. The actuator is operatively coupled to the membrane. The transducer may be either a receiver or a microphone.
申请公布号
WO9963652(A1)
申请公布日期
1999.12.09
申请号
WO1999US11761
申请日期
1999.05.27
申请人
KNOWLES ELECTRONICS, INC.;PEDERSEN, MICHAEL;LOEPPERT, PETER