POLISHING CHIP DISCHARGE SYSTEM OF CMP DEVICE,申请号JP19980151214-传众专利搜索

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发明名称	POLISHING CHIP DISCHARGE SYSTEM OF CMP DEVICE
摘要
申请公布号	JPH11333722(A)	申请公布日期	1999.12.07
申请号	JP19980151214	申请日期	1998.06.01
申请人	NKK CORP	发明人	SAKURAI KOICHI
分类号	B24B55/06;H01L21/304;(IPC1-7):B24B55/06	主分类号	B24B55/06
代理机构		代理人
主权项
地址

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