,申请号JP19960172251-传众专利搜索

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发明名称
摘要
申请公布号	JP2986410(B2)	申请公布日期	1999.12.06
申请号	JP19960172251	申请日期	1996.07.02
申请人	MATSUSHITA DENKI SANGYO KK	发明人	NAKADA KAZUKI;HAGI TOSHIO
分类号	G01R31/26;G01N21/88;G01N21/956;G06F17/50;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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