Reliable modular production quality narrow-band high rep rate arf excimer laser

摘要

The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz with a full width half maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber (211), a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module (206) and an output coupler module (216); a wavemeter module (213), an electrical control module (205), a cooling water module (203) and a gas control module (202). Improvements in the pulse power unit to produce faster rise time and improved pulse energy control include: an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module (209) that generates a high voltage pulse from the capacitors charged by the high voltage power supply (20) and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. The compression head (207) saturable inductor greatly reduces the quantity of oil required and virtually eliminates the possibility of oil leakage.