Direct optical diagnosis of atmospheric and near atmospheric pressure plasmas in micro-plasma cell for e.g. gas analysis

摘要

The process has the following steps: integration of an optical component into the substrate of the cell that can be coupled to the light detector of a spectrometer and diagnosis of the spectral lines using a spectrometer to analyze the plasma emission. The micro-plasma cell comprises an optical dielectric that is made of three layers (15-17) that serves as a light wave-guide.