Partial pressure measurement of oxygen in apparatus used to pull single crystals

摘要

The partial pressure is measured continuously and on-line either above the melt or in the vented gas flow. A reference gas is placed in a small quartz glass tube which is in contact with an electrode material such as platinum, on both sides. This quartz tube and a temperature measuring device are enclosed by a protective tube in which holes are provided. The probe has a solid electrolyte that contains an alkali metal or a transition element. Using the probe the partial pressure of oxygen can be continuously compared with a desired predetermined value and then if necessary adjusted.