| 摘要 |
<p>PROBLEM TO BE SOLVED: To surely return a mounting table as far as a position which is collectively formed integrally as a shell irrespective of a wafer position on a wafer holding member, and surely receive the shell on the mounting table, by retrieving positions of a semiconductor wafer and the mounting table by using a controller, on the basis of an identification code which is read at the time of dismantling. SOLUTION: When a shell S is dismantled, information of an identification code 62 of contact is taken in a controller 40 with a reader 41. Position information corresponding to the identification code is retrieved via a central processing part, and a position of a main chuck 16 at the time of collectively forming an integral body as a shell is operated on the basis of the result of the retrieving. The controller 40 drives and controls a main chuck 15 on the basis of an operated value. The main chuck 15 is moved to a position at the time when a wafer chuck, a wafer and a contact have been collectively formed in an unified body as a shell S. The shell S is received on the main chuck 16, a valve mechanism of the shell S and a valve operating mechanism of the main chuck 15 are connected, and shell S is made able to be dismantled.</p> |
