| 摘要 |
PROBLEM TO BE SOLVED: To confirm the precision in mounting an optical part to a holder and to improve the reliability in adhering/fixing. SOLUTION: A preload is applied from an optical part 2 to a holder 1 by a down direction preload applying mechanism, the distortion generated in a holder base 1a is measured by a strain gage 20 under the above condition and the contact condition between the part 2 and the holder 1 is detected. If no distortion is measured in the base 1a and the part 2 and the holder 1 are put in a completely uncontacting condition, the preload from the part 2 to the holder 1 by the mechanism is increased. If the distortion is measured in the base 1a and the part 2 and the holder 1 are in a contacted condition, the relative angle between the part 2 and the holder 1 is adjusted and the part 2 is adhered to the holder 1. |
