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申请公布号
JP2985413(B2)
申请公布日期
1999.11.29
申请号
JP19910227568
申请日期
1991.09.09
申请人
FUJITSU KK
发明人
INOE RIICHI
分类号
H01L21/20;H01L21/205;H01L21/22;H01L21/36;(IPC1-7):H01L21/20
主分类号
H01L21/20
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