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经营范围
发明名称
WET ETCHING METHOD
摘要
申请公布号
JPH11323576(A)
申请公布日期
1999.11.26
申请号
JP19980142334
申请日期
1998.05.08
申请人
SUMITOMO PRECISION PROD CO LTD
发明人
MATSUMOTO HITOSHI;AWANO NORIYASU;MIZUKAWA SHIGERU
分类号
G02F1/13;C23F1/00;H01L21/00;H01L21/306;H05K3/06;(IPC1-7):C23F1/00
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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