TORQUE SENSOR ELEMENT AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a torque sensor element having no void defect in a magnetic film and excellent in magnetic characteristic such as magnetostriction manifestation characteristic and to provide its manufacturing method. SOLUTION: A film 13 made of a magnetic substance is formed on a substrate 11 made of a nonmagnetic substance, the torque of a rotor is detected by the magnetostriction of the film 13 in this torque sensor element. A flammable gas and/or a flammable liquid is used as a fuel, this fuel is burned with oxygen to form a flame having the combustion pressure of 0.3-0.9 MPa, and flame spraying material powder is fed in this flame by the high-speed gas flame spraying method to form the film 13.