| 摘要 |
PROBLEM TO BE SOLVED: To provide a sticking method for a polishing pad to reliably stick the polishing pad on the upper surface of a base plate. SOLUTION: A polishing pad 3 is sticked on the upper surface of a base plate 1, and an object to be polished mounted on a pressure plate 5 positioned above is pressed against the polishing pad 3 for polishing. In a method to stick the base plate 1 and the polishing pad 3 of a so formed polishing device, the receiving part of a reference part mounted on the polishing pad 3 is caused to coincide with a reference part arranged at the base slate 1. Thereafter, a rotation roller 7 arranged at the pressure plate 1 is driven and rotated for sticking with the roller pressing the upper surface of the polishing pad 3 during rotation of the base plate 1 arranged on the pressure plate 1. |
