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发明名称
Apparatus and method for generating plasma
摘要
申请公布号
EP0566143(B1)
申请公布日期
1999.11.24
申请号
EP19930106240
申请日期
1993.04.16
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;TOKYO ELECTRON LIMITED
发明人
NAKAGAWA, SATOSHI;TAHARA, YOSHIFUMI;OGASAWARA, MASAHIRO
分类号
H01J37/32;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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