发明名称 |
Method for forming dual damascene structure |
摘要 |
A method for forming dual damascene metallic structure that utilizes the formation of a protective photoresist layer at the bottom of a vertical window to prevent damages to a device region in the substrate when subsequent etching operation is carried out to form a horizontal trench pattern. The protective photoresist layer at the bottom of the vertical window is formed by irradiating the photoresist layer with a dose of radiation having energy level insufficient to chemically dissociate the photoactive molecules of the photoresist layer near the bottom of the vertical window.
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申请公布号 |
US5989997(A) |
申请公布日期 |
1999.11.23 |
申请号 |
US19980061659 |
申请日期 |
1998.04.17 |
申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
LIN, BENJAMIN SZU-MIN;JENQ, JASON |
分类号 |
H01L21/768;(IPC1-7):H01L21/314 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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