发明名称 |
Chemical gas analysis during processing of chemically amplified photoresist systems |
摘要 |
Gases evolved during photolithographic processing of chemically amplified photoresist systems are monitored to allow optimization of process parameters such as intensity and duration of applied heat or radiation. Specifically, during soft bake, evaporation of solvent gases is detected. During exposure and PEB, gases evolved during activation of the polymer resin component by the photoacid are detected. The intensity and/or duration of the heating or exposure are then varied to optimize resolution of the particular photolithography process. Residual gas analysis, diode laser spectroscopy, FT-IR spectroscopy, and electronic sensing may be utilized alone or in combination to monitor composition and/or concentration of evolved gases in accordance with the present invention.
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申请公布号 |
US5989763(A) |
申请公布日期 |
1999.11.23 |
申请号 |
US19980086320 |
申请日期 |
1998.05.28 |
申请人 |
NATIONAL SEMICONDUSTOR CORPORATION |
发明人 |
BENDIK, JOSEPH;ROMANO, ANDREW R.;JAKATDAR, NICKHIL |
分类号 |
G03F7/20;G03F7/38;(IPC1-7):G03F9/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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