发明名称 |
Method of processing a substrate utilizing specific chuck |
摘要 |
A substrate (10) having a central region (32) and a peripheral region (34) is processed using a chuck (40) that contacts peripheral regions (34) of the substrate but not the central region. A fabrication step is performed while the substrate (10) is on the chuck (40, 60, 70). The chuck can be used in the formation of a lithographic mask or a semiconductor device.
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申请公布号 |
US5989760(A) |
申请公布日期 |
1999.11.23 |
申请号 |
US19980040471 |
申请日期 |
1998.03.18 |
申请人 |
MOTOROLA, INC. |
发明人 |
MANGAT, PAWITTER JIT SINGH;DAUKSHER, WILLIAM JOSEPH |
分类号 |
H01J37/09;(IPC1-7):G03F9/00 |
主分类号 |
H01J37/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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