发明名称 Method of making compact integrated microwave assembly system
摘要 The invention relates to a method for producing low cost integrated microwave assemblies, where a photoresist layer is deposited onto a substrate, a portion of the photoresist is selectively removed, a first conductive layer is applied, and, a second portion of the photoresist is removed leaving isolation walls and cavities. Electrical components are placed in the cavities and a first dielectric layer fills the cavities. Vias are created in the first dielectric material exposing the electrical contacts, a second conductive layer is applied into the vias and over the first dielectric material. The second conductive layer is patterned by removing a portion of the second conductive layer creating a signal line pattern in the second conductive layer.
申请公布号 US5987732(A) 申请公布日期 1999.11.23
申请号 US19980137288 申请日期 1998.08.20
申请人 TRW INC. 发明人 LEE, ALFRED E.;DAVIDHEISER, ROGER A.;LAU, JAMES C.
分类号 H05K3/46;H01L21/50;H01L23/552;H01L23/66;H01L25/00;H01L25/04;H01L25/18;H01P11/00;H05K1/02;H05K1/18;H05K3/00;(IPC1-7):H01P11/00 主分类号 H05K3/46
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