HOLOGRAPHIC PATTERNING METHOD AND TOOL EMPLOYING PRISM COUPLING
摘要
A holographic lithography tool (110) for generating a light interference pattern used to expose a photosensitive medium (119) employs a refracting prism (121) in the optical path between divergent illuminating beams (127a, 127b). The prism is optically coupled to the photosensitve medium via an index matching fluid (123). By increasing the incident beam angle and the index of refraction, the prism reduces the size of features recorded in the photosensitive material. The divergent illuminating beams are generated by a beam delivery system which preferably employs easily adjustable fiber optic cables (176, 184). Use of the prism coupling technique facilitates use of fiber-optic-compatible wavelengths in the blue region of the spectrum in a variety of applications, such as distributed feedback grating fabrication.
申请公布号
WO9959035(A1)
申请公布日期
1999.11.18
申请号
WO1999US10708
申请日期
1999.05.14
申请人
HOLOGRAPHIC LITHOGRAPHY SYSTEMS, INC.;HOBBS, DOUGLAS, C.;MACLEOD, BRUCE, D.;KELSEY, ADAM, F.
发明人
HOBBS, DOUGLAS, C.;MACLEOD, BRUCE, D.;KELSEY, ADAM, F.