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发明名称
VERFAHREN ZUM ABTRENNEN DUENNER KRISTALLSCHEIBEN AUS HALBLEITERMATERIAL VON EINKRISTALLSTAEBEN
摘要
申请公布号
DD131102(A2)
申请公布日期
1978.05.31
申请号
DD19760192348
申请日期
1976.04.14
申请人
MOHR,ULRICH,DD
发明人
MOHR,ULRICH,DD
分类号
H01L21/30;(IPC1-7):H01L21/30
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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