| 摘要 |
The valve seat is located between the inlet (3) and the outlet (4), said valve seat having a gland (8) that is pressed by an elastic membrane preferably formed by part of a polysilicon layer and mounted above a cavity (2). Whenever a medium flows on the side of the membrane facing the gland, said membrane is lifted by the gland and pushed into the cavity in a manner such that the medium can flow through the valve. The membrane can be stiffened by a stamp-like fitting in order to ensure that the valve is opened evenly. |
