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发明名称
VACUUM EXHAUSTING SYSTEM FOR TREATING APPARATUS
摘要
申请公布号
KR100231255(B1)
申请公布日期
1999.11.15
申请号
KR19950019197
申请日期
1995.07.01
申请人
TOKYO ELECTRON LIMITED
发明人
ARAMI, JUNICHI;GITAMURA, MASAYUKI;GOMINO, MITSUAKY
分类号
F04B37/16;C23C16/44;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/304
主分类号
F04B37/16
代理机构
代理人
主权项
地址
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