APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE,申请号KR19950013870-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100231686(B1)	申请公布日期	1999.11.15
申请号	KR19950013870	申请日期	1995.05.30
申请人	KABUSHIKI KAISHA TOSHIBA	发明人	MIYASHITA, NAOTO;KATAKABE, ICHIRO;KAWAMOTO, HIROSHI;DOI, KENJI;OKUDA, TSUYOSHI
分类号	H01L21/22;H01L21/00;H01L21/324;(IPC1-7):H01L21/324	主分类号	H01L21/22
代理机构		代理人
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