发明名称 |
Acoustic transducers and method of microfabrication |
摘要 |
There is provided an acoustic transducer which includes a membrane of selected size and shape supported at its edges spaced from a first conductive electrode by an integral support structure with the second conductive electrode comprising a thin metal film on the membrane. The active membrane area is undisturbed by etch vias.
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申请公布号 |
US5982709(A) |
申请公布日期 |
1999.11.09 |
申请号 |
US19980052818 |
申请日期 |
1998.03.31 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
LADABAUM, IGAL;JIN, XUECHENG;KHURI-YAKUB, BUTRUS T. |
分类号 |
H01L41/09;(IPC1-7):H04R17/00 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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