EXHAUST GAS TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for treating combustion exhaust gas discharged from a combustion type detoxifying apparatus for treating harmful gas discharged from a semiconductor manufacturing process by using a compact equipment. SOLUTION: A vertical exhaust gas inflow passage 6 and an exhaust gas outflow passage 7 are formed within a casing 1 so as to be demarcated and allowed to communicate by a communication port 9 and an impeller 2 is arranged in opposed relation to the communication port 9 so as to be rotatable around a horizontal axis. A washing water jet nozzle 16 ejecting washing water toward an inflow port 11 of the exhaust gas inflow passage 6 is arranged and a washing water jet nozzle 17 ejecting washing water to the communication port 9 part is arranged. An eliminator 15 is arranged in the exhaust gas outflow passage 7 on the downstream side of the impeller 2. A washing water jet nozzle 18 is arranged to be turned toward the eliminator 15 on the downstream side of the eliminator 15. A drain tank 4 receiving washing water after ejected is arranged within the casing 1 on the underside of the exhaust gas inflow passage 6 and the exhaust gas outflow passage 7.