| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film magnetic head capable of improving various characteristics, such as thermal conductivity of AlN films and the corrosion resistance to an aq. alkali soln., even when the AlN films are used as gap layers formed above and below a magneto-resistive element layer and a sputtering method for depositing the thin-film magnet head. SOLUTION: A high-frequency power source 18 is connected to a substrate holding part 12 as well and the bias electric power to be supplied to this substrate holding part 12 is set at >=17 to <=40 W, by which the average crystal grain size of the AlN film deposited on the substrate 13 may be set at >=85 to <=130 Angstrom and the denseness of the film may be improved. Then, the heat release property of the AlN film and the corrosion resistance to the aq. alkali soln. may be improved. Further, the hardness of the AlN film may be enhanced, the surface resistance increased and the surface roughness reduced.
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