| 摘要 |
<p>PROBLEM TO BE SOLVED: To miniaturize a device and at the same time inspect a plurality of points of a printed electrode simultaneously, by carrying in an inspection target between an X-ray source and an X-ray sensor, screening the carry-in side and carry-out side of a carrier path, applying X rays from the X-ray source, and detecting X rays through the inspection target. SOLUTION: An X-ray sensor 1 consists of a scintillator and a CCD, and an X-ray source 2 applies X rays. When an inspection target 4 on a conveyor 9 is carried in, a carry-in port side shielding shutter 3a is released, the inspection target 4 is carried between the X-ray source 2 and the X-ray sensor 1, the conveyor 9 is stopped, and the carry-in side shielding shutter 3a is closed. X rays are applied while the shielding shutter 3b is closed, and an image is picked up by the X-ray sensor 1. After the image pick-up is completed, the shielding shutter 3b is released and the conveyor 9 is moved, and the inspection target 4 whose image has already been picked up is carried out. The inspection target 4 whose image has already been picked up is carried out simultaneously with the carry-in of the inspection target 4, and then the carry-in and carry-out side shielding shutters 3a and 3b are opened and closed simultaneously.</p> |
