| 摘要 |
<p>PROBLEM TO BE SOLVED: To unify an electron discharge characteristic and to improve electron discharge efficiency by applying a process, by which an adsorptive material on the surface is removed, to a conductive film formed on a substrate and provided with an electron discharge part arranged over a pair of element electrodes. SOLUTION: An electron discharge part 5 is formed by a high resistance crack formed in a part of a conductive film 4, and conductive particles may be contained inside the electron discharge part 5. After a substrate 1 is washed and an element material is layered by vacuum vapor deposition and the like, element electrodes 2, 3 are formed by means of a photolithography technique, for example, and an organic metal film is formed by applying organic metal solution onto the electrodes 2, 3. These are heated and burnt, and patterning is carried out by a lift-off or etching method, and a conductive film 4 is formed. When the substrate is heated in the vacuum, an adsorptive material on the conductive film 4 surface is released, and a uniform clean film surface is exposed between the elements. Subsequently, a forming process based on electrical processing, an activation process, and a stabilization process are carried out, and then, a manufacturing process is finished.</p> |
