Optical parameter measuring device e.g. for optical layer absolute thickness and refractive index measurement

摘要

The measuring device has a light source (1,2) providing a coherent light beam (6) of given wavelength and beam diameter, fed to an angle spectrum device (3), providing an angle spectrum beam directed onto the optical layer (4), with detection of the reflected and/or transmitted light and evaluation of the refraction pattern for determining the optical layer thickness and refractive index. An Independent claim for an optical parameter measuring method is also included.