METHOD AND SYSTEM FOR SUPPLYING SEMI-CONDUCTOR SOURCE MATERIAL
摘要
A method of supplying source material in a crystal puller used to grow single crystal semi-conductor material. Generally, the method includes receiving a bulk container of the source material at a facility having the crystal puller and configuring the bulk container of gravity feed of the source material from the container. The bulk container is transported to the crystal puller and a predetermined quantity of source material is dispensed directly from the bulk container into the crystal puller. Apparatus and a system for use in supplying source material are also disclosed.
申请公布号
WO9955940(A1)
申请公布日期
1999.11.04
申请号
WO1999US04697
申请日期
1999.03.03
申请人
MEMC ELECTRONIC MATERIALS, INC.
发明人
DESTEFANO, MARK;EOFF, JAMES, D., SR.;SCHULTE, THOMAS, H.;ANDERSON, JOHN, M.;YAU, ENG, CHIN;RUGGERI, DONALD, R.;BALDWIN, DAVID, W.;BADINO, CHARLES, L.