发明名称 METHOD AND SYSTEM FOR SUPPLYING SEMI-CONDUCTOR SOURCE MATERIAL
摘要 A method of supplying source material in a crystal puller used to grow single crystal semi-conductor material. Generally, the method includes receiving a bulk container of the source material at a facility having the crystal puller and configuring the bulk container of gravity feed of the source material from the container. The bulk container is transported to the crystal puller and a predetermined quantity of source material is dispensed directly from the bulk container into the crystal puller. Apparatus and a system for use in supplying source material are also disclosed.
申请公布号 WO9955940(A1) 申请公布日期 1999.11.04
申请号 WO1999US04697 申请日期 1999.03.03
申请人 MEMC ELECTRONIC MATERIALS, INC. 发明人 DESTEFANO, MARK;EOFF, JAMES, D., SR.;SCHULTE, THOMAS, H.;ANDERSON, JOHN, M.;YAU, ENG, CHIN;RUGGERI, DONALD, R.;BALDWIN, DAVID, W.;BADINO, CHARLES, L.
分类号 B66F9/06;B66F9/18;C30B15/00;C30B15/02 主分类号 B66F9/06
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