LIQUID EJECTION HEAD, MANUFACTURE THEREOF, HEAD CARTRIDGE HAVING LIQUID EJECTION HEAD MOUNTED THEREON, AND LIQUID EJECTOR

摘要

PROBLEM TO BE SOLVED: To obtain a highly reliable liquid ejection head having stabilized ejection characteristics by forming the movable member of the liquid ejection head, and the like, with high accuracy and high density. SOLUTION: A spacer layer 41 is formed on an element substrate 1 provided with a heat element (not shown) for generating a bubble in a liquid and an uppermost conductor layer, i.e., a cavitation resistant trim 17. A latent image layer 42 of a conductive material is then formed on the spacer layer 41 in the form of a movable member 6. A part corresponding to the supporting/ securing part of the movable member 6 is then removed from the spacer layer 41 and an opening 43 exposing the cavitation resistant film 17 is made on the upper stream side of the latent image layer 42 in the liquid channel direction of the liquid ejection head. Subsequently, a plating layer 44 forming the movable member 6 is deposited by electroplating on the film 17 and the layer 42 with the film 17 as a cathode and the spacer layer 41 is removed to form the movable member 6.