| 摘要 |
The apparatus has a substantially planar base having a surface which defines a wafer cassette receiving station and a wafer receiving station. A transportable wafer cassette is removably coupled to the base in the wafer cassette receiving station. The transportable wafer cassette is provided for holding a plurality of wafers in an axially aligned manner, each of the wafers having identification indicia disposed on a surface thereof. A wafer receiving cassette is coupled to the base adjacent to the transportable wafer cassette in the wafer receiving station. A first reciprocally moveable wafer transfer member is attached to the base, and is operative for transferring the wafers held in the transportable wafer cassette to the wafer receiving cassette. The wafer transfer member includes a wedge shaped block for aligning the wafers in the wafer receiving cassette in an axially offset manner relative to each other so that the identification indicia on the surface of each wafer is visible for reading by an operator. A second reciprocally moveable wafer transfer member disposed adjacent to the base is provided for transferring the remaining wafers from the wafer receiving cassette to the transportable wafer cassette and aligning the wafers in the transportable wafer cassette in an axially aligned manner.
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