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发明名称
ION IMPLANTING DEVICE
摘要
申请公布号
JPH11297634(A)
申请公布日期
1999.10.29
申请号
JP19980097258
申请日期
1998.04.09
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
IDO MASUMI;TSUTSU HIROSHI
分类号
H01J37/317;H01L21/027;H01L21/265;H01L21/302;H01L21/3065;(IPC1-7):H01L21/265;H01L21/306
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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