| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a process monitor and control device capable of detecting an abnormal change in a process in process drive controlling operation. SOLUTION: The process monitor and control device for outputting a control command from a central processing unit (CPU) to a process equipment 3 or inputting a state signal of the equipment 3 is provided with a database 23 containing the data expressing the tendency of the state input signal of the equipment 3 against the control command output signal to the equipment 3, and a comparing processing part 24 for comparing data in the database 23 with the control command output signal and the state input signal. Data based on plural variables corresponding to the variation of data to be checked by the equipment 3 are stored in the database 23.</p> |
