| 摘要 |
An electrostatic chuck including a body of ceramic (14) and a metal backing portion (12) for mounting the chuck directly to a metal pedestal and a process of manufacturing the electrostatic chuck using a simple sintering step. The ceramic portion (14), preferably ALN, has electrodes (30, 31) formed therein and extends through holes in the metal portion (12) preferably Mo, thereby forming an integral feed-through for connecting the electrodes (30, 31) by metal (33, 34). |
